Combination stop for catoptric projection arrangement

ABSTRACT

The disclosure relates to an optical projection arrangement that can be used to image a reticle onto a substrate. The projection arrangement includes reflective elements, by which a ray path is defined. A combination stop is in a pupil of the ray path. The combination stop has a first opening (aperture opening) for use as an aperture stop. The combination stop also has a second opening for allowing passage of a ray bundle of the ray path, such that the combination stop acts as a combined aperture stop and stray light stop. In addition, the disclosure relates to a corresponding combination stop for optical arrangements, as well as related systems, components and methods.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of, and claims priority under 35 USC120 to, U.S. application Ser. No. 12/173,595, filed Jul. 15, 2008, whichclaims priority under 35 U.S.C. §119 to German patent application DE2007 033 054.7, filed Jul. 16, 2007. The contents of both of theseapplications are hereby incorporated by reference in their entirety.

FIELD

The disclosure relates to an optical projection arrangement that can beused to image a reticle onto a substrate. The projection arrangementincludes reflective elements, by which a ray path is defined. Acombination stop is in a pupil of the ray path. The combination stop hasa first opening (aperture opening) for use as an aperture stop. Thecombination stop also has a second opening for allowing passage of a raybundle of the ray path, such that the combination stop acts as acombined aperture stop and stray light stop. In addition, the disclosurerelates to a corresponding combination stop for optical arrangements, aswell as related systems, components and methods.

BACKGROUND

Microlithography with extreme ultraviolet light, so-called EUVlithography (EUVL), in which wavelengths of electromagnetic radiation ofaround 13 nm are employed, generally uses imaging arrangements havingpurely reflective optical elements (catoptric systems). Typically, incorresponding EUVL projection exposure systems, both the illuminationunit, which uniformly illuminates a reflective mask (reticle), and theoptical projection arrangement for imaging the structures of the reticlein a reduced image onto a wafer coated with a photosensitive material,have mirror arrangements.

SUMMARY

In some embodiments, the disclosure provides an optical projectionarrangement with a plurality of reflective elements that can facilitateflexible use of the optical projection arrangement in a simple andeffective way. The optical projection arrangement can provide goodimaging properties.

In certain embodiments, the projection arrangement images at least partof a reticle that is positioned in an object field of an object planeonto a wafer that is positioned in an image field of an image plane. Theprojection arrangement includes an exchangeable combination stop, whichhas at least one aperture opening (first opening) for the passage of aray bundle in a pupil plane of the ray path and at least a secondopening (e.g., a third opening or several openings) for the passage ofadjacent ray bundles. The stops created by the second and/or thirdopenings are termed field stops. Positioning of the combination stop canoccur with the stop plane (principal surface) transverse (e.g.,perpendicular) to a meridional plane defined by the object field and theprojection arrangement, and the movement for exchanging thecorresponding combination stop can be performed transversely (e.g.,perpendicularly) to the meridional plane. In some embodiments, thepositioning can occur at an angle in the range of 80° to 100° (e.g., 85°to 95°) to the meridional plane.

The second and/or third and every further opening for allowing passageof adjacent ray bundles in the meridional plane can be given a certainminimum size in spite of cramped space conditions, so the possibility iscreated of simultaneously achieving adequate obscuration of stray lightand flexibility for different imaging parameters and/or for designs ofthe arrangement. Generally, the openings are as small as desired forshielding of stray light and as wide as possible for ray path design. Insome embodiments, the second and/or third opening and/or each furtheropening for adjacent ray bundles in the meridional plane can have anopening width of ≧10 mm (e.g., ≧20 mm, ≧40 mm). In certain embodiments,the diameter of the opening width of the aperture stop may be in therange of 70 to 200 mm (e.g., 80 to 150 mm, 100 to 110 mm). This can bethe case, for example, for EUV systems having a numerical aperture NA of0.25 to 0.6 at the wafer side.

The second or third opening or further openings for adjacent ray bundlescorrespond to each other in their mode of action and can therefore havesimilar properties. Optionally, the second and third opening can beconfigured in point-symmetrical fashion about the center of the firstopening (aperture opening).

For simple replacement of the combination stop, a device for moving thecombination stop can be provided, which facilitates exchange via arotary movement and/or translational movement or combined movements. Insome embodiments, the plane of the movement can be the planeperpendicular to the meridional plane. This movement plane can beadvantageous for the design and the configuration of a correspondingcatoptric projection arrangement, with allowance for all boundaryconditions for the configuration and arrangement of the reflectiveelements and the housing and movement device, as well as with regard tothe simplicity of the movement, etc.

Optionally, the combination stop can be pushed in the direction of theray path by the corresponding device for moving the combination stop.This can be advantageous for the purpose of adjustment to the imagingproperties. In this regard, the movement can occur parallel to theoptical axis, such that at least a vectorial movement component occursin the direction of the ray path.

In certain embodiments, for which protection is sought independently andin connection with the other aspects of the disclosure, a projectionarrangement has a combination stop with a first opening, which acts asaperture stop, and a second opening, which serves as stray light stop orfield stop, wherein the second opening extends transversely to theoptical axis and, in accordance with a Cartesian coordinate system, hasa maximum longitudinal extension and a minimum extension, wherein thecombination stop is constructed such that the at least one first openingis provided only along a first direction (longitudinal direction) of thecombination stop transverse to the direction of the maximum length ofthe second opening or parallel to the direction of the minimum width ofthe second opening. This can yield an elongated structure of thecombination stop, which is very advantageous for using the combinationstop in catoptric projection arrangements of microlithography becausethe installation space is small. In such optical arrangements, theobject field to be imaged is formed as an elongated strip or as a narrowring segment. Forming the combination stop as an elongated plate in thedirection of the short extension of the field stop opening or the secondopening, enables the combination stop or segments thereof to beexchanged by simple (e.g., translational movements) without the need fora large installation space. Moreover, such a design involves littleinstallation space overall for the arrangement. This also applies in thearrangement of further first and/or second or third openings on thecombination stop, which are correspondingly arranged along thelongitudinal direction.

In some embodiments, a combination stop can be chosen such thatcorresponding first or second openings are each provided only along asecond direction (width direction) of the combination stop parallel tothe direction of the maximum length of a second opening or transverse tothe direction of the minimum width of a second opening. In this case,the outcome is a row of only second openings and/or a row of only firstopenings, such that, again, an elongated shape of the combination stopis achieved, but this time in the width direction, i.e. in the directionof the maximum length of the second openings.

Overall, therefore, an arrangement of first and second or third openingsalong a row, or of first openings and second openings in one row each,can allow the combination stop to be correspondingly rectangular, whichis ideal for the purpose of using the combination stop in the projectionoptics of a projection exposure system for microlithography and thespace conditions prevailing there, since corresponding installationspace can be saved and more flexible use is possible.

The openings can be arranged along the longitudinal direction or thewidth direction of the combination stop such that the centers of gravityof the cross-sections of the openings are in a straight line.

A stop can be dimensioned such that the width of the combination stoptransverse to the longitudinal direction is less than 1.5 times (e.g.,less than 1.2 times, less than 1.1 times) the diameter of the largestfirst opening or the largest maximum length of a second opening. Thecombination stop can involve little installation space in a directiontransverse to the longitudinal direction, i.e. laterally. Thus,violation of the adjacent ray path can be avoided and the installationspace of the optical arrangement can be kept small overall. Moreover,through corresponding lateral movement of the combination stop or partsthereof, that is, in the width direction of the combination stop,exchanging of corresponding stop parts can proceed more simply andfavourably. Again, little installation space may be involved. The sameapplies to a movement of the combination stop in the longitudinaldirection.

An arrangement of the first openings in a row in the width direction ofthe combination stop and/or an arrangement of the second openings alsoin a row in the width direction of the combination stop involves only asmall installation height in the longitudinal direction of thecombination stop, which, for example, is defined only by the diameter ofa first opening and the minimum opening width of a second opening and ofa corresponding distance between first and second opening and asurrounding frame for the purpose of stabilisation. For example, thedimension of 1.5 times the sum of the diameter of the first opening andthe opening width of the second opening(s) in the longitudinal directionof the combination stop can be sufficient here. In this way, thecombination stop involves little installation space yet simultaneouslyallows an advantageous exchange of stops for adjustment of the imagingconditions through simple translational movements along the longitudinaldirection or the width direction. Exchanging of the stops can be carriedout in such a manner that a plurality of different stop openings isprovided on a stop plate, the openings being arranged correspondingly inrows, such that a simple pushing movement brings the different stopopenings into position. In addition or alternatively, it is alsopossible to provide several corresponding combination stops forexchanging.

In some embodiments (e.g., for which protection is sought independentlyand in connection with the other aspects of the disclosure), it ispossible to arrange several different combination stops or parts thereoffor the purpose of quick exchange in a magazine within the projectionarrangement or in the vicinity of the projection arrangement in orderthat a further adjustment to various imaging conditions may befacilitated.

A magazine with a plurality of combination stops can facilitate exchangeof the combination stops via an exchange mechanism. This ensures thatcombination stops with different openings (e.g., different openingcross-sections, shapes and sizes) are present, which can be introducedinto the ray path for the purpose of adjustment to the imagingconditions.

The plurality of the different combination stops can be designed suchthat combination stops of different opening cross-sections of theaperture stops are provided for, wherein the stray light stops or fieldstops additionally integrated into the combination stop (second or thirdopenings) are also reduced in accordance with the reduced aperturestops, or are also enlarged in the case of enlarged aperture stops orare kept constantly unchanged irrespective of the change in the aperturestops relative to their opening cross-section.

A further advantage for the effective operation of such a projectionarrangement and the flexibility can be gained by a combination stophaving a segmental design, such that only parts of the combination stophave to be exchanged. This also has the advantage that a smaller numberof combination stop components need only be held in stock. In thisregard, the segmentation may occur separately into different classes,more precisely the class of aperture segments on one hand and the classof other segments or field segments on the other. The class of aperturesegments contains the segments with the aperture opening (firstopening), while the other segments are contained in the other class.Separation of the classes simplifies exchange.

Correspondingly, the segments of the combination stop can also beseparately moved and exchanged by the device for moving the combinationstop. The aperture stop part (aperture segment) can be separately andindependently exchangeable, such that the field segments, which mostlydo not need changing, can remain in the projection arrangement when anaperture segment is exchanged.

Optionally, the combination stops or segments thereof can have arectangular or quadratic structure in a plan view of the largest side(principal surface).

The combination stop provided in the projection arrangement can beconfigured for a catoptric projection arrangement with several mirrors,for example six mirrors, such that the minimum distance between a firstopening and a second opening is at most 5 mm (e.g., at most 3 mm, atmost 1 mm). This can be advantageous for catoptric projectionarrangements with ray paths moving past each other in very closeproximity.

As a result of the overall small dimensioning of the combination stop,the thickness of the combination stop, i.e. the dimension perpendicularto the length and width direction, can be kept small, too, a fact whichin turn offers benefits in terms of the installation space, as a thinnercombination stop can be provided at more sites of the projectionarrangement than a thick combination stop. By virtue of the smalloverall size, however, sufficient stability of the combination stop inthe case of lower thickness, such as a thickness less than one fiftiethof the diameter of the largest first opening, can be achieved.Optionally, the thickness of the combination stop can be chosen so as tobe less than hundredth of the diameter of the largest first opening.

On account of its small dimensions, the combination stop is capable ofmovement (e.g., translational movement) both in the longitudinal and inthe width direction as, due to the small dimensioning, conflict with therest of the ray path can largely be avoided, such that a translationalmovement is possible both in the longitudinal direction and transverseto it. In this way, by a simple pushing movement, several aperture stopsarranged side by side along a longitudinal direction or, for example, astraight line can be brought simply into use or in the case of asegmented design, for example, individual aperture parts can be simplyexchanged. A swivelling movement about a rotary axis is also readilypossible due to the small dimensioning of the inventive combinationstop, since, here, too, conflicts or collisions with other components ofthe projection arrangement or the ray path are more easily avoided.

Accordingly, the combination stop can be dimensioned so small as toensure that, in at least one direction transverse to the optical axis,it has at most one third of the maximum or minimum extension of theenvelope of the projection arrangement transverse to the optical axis.By envelope here is meant the at least mental accommodation of theprojection arrangement in a square similar to a housing. The combinationstop can be chosen so small as to ensure that the combination stop in atleast one direction transverse to the optical axis has at most onefourth (e.g., at most one fifth) of the maximum or minimum extension ofthe envelope of the projection arrangement transverse to the opticalaxis.

In a corresponding catoptric projection arrangement, at least one otherstray light stop in addition to the combination stop can be provided,which can be of designed to be movable together with the combinationstop for the purpose of effective configuration of the projectionarrangement. A further stray light stop can be arranged in a field planeor an intermediate image plane or in a nearby area to one of theseplanes.

For common movement of combination stop and further stray light stop,these can be joined together physically (e.g., rigidly jointed,articulatedly joined).

A further advantage can be derived from the combination stop ifobscuration mechanisms and/or other optically operative elements, suchas apodisation filters, phase filters, optically polarizing elements,etc. are provided in the area of the first opening (aperture opening) inthe combination stop. Via obscuration in the pupil (pupil filtering),for example, through a disc or a ring, part of the zeroth orderdiffraction of an object to be imaged can be obscured, and thus thecontrast and/or the depth of field of the imaging can be improved.

In certain embodiments, the combination stop can be part of a housing(e.g., a vacuum housing) which is provided inside the projectionarrangement to create advantageous vacuum conditions. This is describedin detail in DE 10 2006 044 591 and is hereby incorporated herein byreference in its entirety.

The combination stop and/or a magazine for this can be arranged inside ahousing (e.g., a vacuum chamber) or outside of it.

In certain embodiments (e.g., for which protection is soughtindependently of the other aspects and in connection with them), acombination stop for an optical arrangement is claimed, which has atleast a first opening for use as aperture stop and at least a secondopening for use as field stop, wherein the at least one second openinghas an extension, such that, in two mutually perpendicular directions,such as in a Cartesian coordinate system, a maximum length and a minimumwidth of the second opening is given, wherein the at least one firstopening or further second openings are arranged only along thelongitudinal direction of the combination stop transverse to thedirection of maximum length or parallel to the direction of the minimumwidth of the second opening. Such a combination stop can be used forprojection exposure systems for microlithography and there, as describedabove, for projection arrangements or projection optics.

BRIEF DESCRIPTION OF THE FIGURES

Further advantages, characteristics and features of the disclosure areapparent from the following detailed description using the encloseddrawings. The drawings show in purely schematic form in which:

FIG. 1 is an illustration of a EUVL projection exposure apparatus withan illumination system and projection optics;

FIG. 2 is an illustration of the projection optics, such as can findapplication with the projection exposure apparatus from FIG. 1;

FIG. 3 is a partial view of the projection optics from FIG. 2 rotatedthrough 90° in the direction of the optical axis;

FIG. 4 is a detailed illustration from FIG. 2;

FIG. 5 is a side view of a combination stop;

FIG. 6 is a side view of a combination stop; and

FIG. 7 is a side view of a combination stop.

DETAILED DESCRIPTION

FIG. 1 is a purely schematic illustration of the principle structure ofa catoptric projection exposure system for EUVL micro-lithographyincluding an illumination system 1 and projection optics 2. Inside theillumination system, the light of a light source 3 in the wavelengthrange of extreme ultraviolet radiation is deflected by several mirrorsor reflective elements onto a reticle 4, whose structure is to be imagedin reduced form onto a wafer 5 coated with a photosensitive layer viathe projection optics 2.

Shown in FIG. 2, also, is a purely schematic illustration of thestructure of a catoptric projection optics which can be used in theprojection exposure apparatus in accordance with FIG. 1.

Shown on the left side of FIG. 2, in turn, is the reticle 4, whichreflects the radiation directed onto reticle 4 via illumination system1, the radiation also capable of being called light and generallyincluding electromagnetic radiation. The reflected radiation 6 isdirected to a first mirror 7, from where the radiation 6 proceeds to asecond mirror 8. After further reflections at a third mirror 9 and afourth mirror 10, the light is finally directed via the fifth mirror 11and sixth mirror 12 onto the wafer 5, where it images the structure ofthe reticle 4 on a reduced scale.

FIG. 3, a view of the projection optics of FIG. 2 rotated through 90°,shows a meridional plane 40, as defined by the projection optics of FIG.2 and the object field 4′. The meridional plane 40 is covered by theoptical axis 15 and a principal beam proceeding from a point of theobject field 4′ at a distance from the optical axis 15. Accordingly, fora given object field 4′, which is scanned, for example, over the reticle4, there is a plurality of meridional planes 40, more precisely for eachpoint of the object field 4′.

In the example shown, the ray path 6 of FIG. 2 has an intermediate imageat the point labelled 13 and a pupil plane between the first mirror 7and the second mirror 8.

In the pupil plane is provided a combination stop 14, which can be movedalong the path 22 into and out of the ray path via a drive mechanism 23.The direction of movement can be along the dotted line 22 orperpendicular to the plane of the page. The combination stop 14 isessentially arranged in the pupil plane, but can also be provided in anarea in front of or behind the pupil plane. Pushing of the combinationstop along the optical axis 15 or in the direction of the ray path 6 canbe facilitated via the drive and movement mechanism 23.

The combination 14 stop has a combined function, namely, on one hand thefunction of an aperture stop for the ray bundle, which proceeds from thefirst mirror 7 through the pupil plane to the second mirror 8. Since theray path 6 of the chosen optical arrangement is such that the aperturestop can be formed only so as to be very small and thus stray lightmight not be reliably removed from the ray path, the aperture stop isformed as a combination stop, which, by virtue of its greaterdimensions, can keep portions of stray light out of the ray path.However, in order that the ray path 6 may not be impaired, i.e., thatthe ray bundle from the reticle 4 to the first mirror 7 or from thesecond mirror 8 to the third mirror 9 may not be blocked, provision ismade, as shown in more detail in FIGS. 3 and 4, for an additional secondopening 17 and a third opening 18 for the corresponding ray bundles inthe combination stop in addition to the first opening (aperture opening)16.

The combination stop 14 is arranged perpendicularly to a meridionalplane and may be moved, perpendicularly to the meridional plane, into orout of the ray path. The meridional plane is covered by the principalray, which goes from the first mirror 7 through the center of theaperture opening of the combination stop 14, and the optical axis 15. Inthe example in FIG. 2, the meridional plane is given by the plane of thedrawing. Alternatively, because of the small dimension of thecombination stop, movement of the combination stop with the direction ofmovement in the meridional plane is also possible.

The combination stop 14, shown in FIGS. 4 and 5 as side views fromviewing angles rotated through 90°, has with regard to the arcuatesecond and third openings 17 and 18 in the meridional plane 28 anopening width d, which is ≧10 mm (e.g., ≧20 mm, ≧40 mm). Through thecorresponding arrangement of the combination stop 14 in the ray path ofa catoptric optical system 2 and the choice of the size of the openingsfor adjacent ray bundles, flexible use of the combination stop andflexible operation of the optical system combined with good shieldingbehaviour for the stray light are facilitated. As a result, not so manydifferent combination stops need to be kept in stock for differentimaging conditions.

Due to the small dimensioning of the combination stop 14, such as thatshown in FIG. 5, there is manifold scope for arrangement and exchange.

As can be seen in FIG. 5, the combination stop 14 can, in plan view, bedesigned as a rectangular or quadratic stop element, wherein the firstopening 16 and the second opening 17 and the third opening 18 arearranged in a row, which extends along the longitudinal direction. Thelongitudinal direction here is defined as the direction transverse tothe maximum extension of the second opening 17 or parallel to thedirection of the minimal extension of the second opening 17. In FIG. 5,the minimum extension of the second opening 17 is given by the openingwidth d, while the maximum length of the second opening 17 is labelledwith the letter 1.

The width B of the combination stop 14 can be defined by a multiple ofthe diameter D of the first opening 16, while the length L of thecombination stop 14 is predefined by the diameter D of the first openingand the opening widths d of the second opening 17 and the third opening18. Since the distance A between the first opening 16 and the secondopening 17 or between the first opening 16 and the third opening 18 canbe chosen so as to be very small, for example, less than 5 mm (e.g.,less than 3 mm, less than 1 mm) the total length L of the combinationstop 14 can be just slightly greater than the sum of the diameter D ofthe first opening 16 and the opening width(s) d of the first and/orsecond and/or third openings 17, 18, for example, 1.5 times (e.g., 1.3times, 1.1 times).

In addition, the combination stop 14, as shown in FIG. 5, can have asegmented structure, such that the aperture can be subdivided into thesegments 19, 20 and 21. The subdivision quoted, indicated by the dottedlines, is not the only possibility, however, and manifold types ofsegmentation are possible. This means that the entire combination stop14 need not be removed from the ray path every time, but that, when apart is being exchanged, such as the segment 19 with the second opening17, just this part can be exchanged. Moreover, this design allows adifferent composition of stop parts, such that fewer stop componentsneed to be kept in stock despite the greater flexibility.

The segments are formed such that they can be interconnected so as tosupport and stabilise each other in the arrangement in the projectionoptics or an optical arrangement generally. For example, the connectingelements may be formed by rail arrangements and the like such that theindividual segments can be easily exchanged and may be readily movedtowards each other.

A corresponding drive and movement mechanism 23, as shown in FIG. 2, isprovided for the exchange of the combination stop 14 or any partthereof. In connection with the drive and movement mechanism 23, amagazine 24 is provided in which a plurality of combination stops 14with different first openings 16 and second and third openings 17 and 18and corresponding combination stop segments 19, 20, 21 are stored andkept available.

Accordingly, the drive and movement mechanism 23 can move thecombination stop 14 or any part thereof on the movement plane 22 so thatthe combination stop 14 overall or any part thereof may be exchanged.The corresponding movement can be translational or take the form of arotary movement or combinations thereof.

As shown in FIG. 2, a second stray light stop 25 can be used in thedesign of the catoptric projection optics, the stop 25 being provided inor near the intermediate image plane 13. The stray light stop 25 canalso be moved into or out of the ray path by a movement on a movementplane 27, optionally with movements similar to the combination stop.This can be done via the same drive and movement device 23 alsoresponsible for the movement of the combination stop 14. To this end, acoupling 26 is provided between the combination stop 14 and the secondstray light stop 25, which may be formed either rigidly or havecorresponding kinematics with articulated joints and the like foroptimising the movement. Through the common movement of the combinationstop 14 and the stray light stop 25, a simplified possibility ofintroducing and removing corresponding stops is created in the crampedspace conditions given in such an optical system.

For the stray light stops, too, different stops may be held in amagazine (not shown).

In FIG. 5 furthermore, the first opening (aperture opening) 16 containsan optional obscuration ring, shown in dotted lines, which is held inthe first opening 16 by corresponding elements 30. Via the ring, some ofthe light, which would pass through the first opening (aperture opening)16 can be obscured in order that the contrast and/or depth of field areaof the imaging may be increased. Instead of a ring 29, a disc or thelike may also be provided or a phase filter or a optically polarisingelement (retarder, polarizer, etc.) or another optically operativeelement.

FIGS. 6 and 7 show two further examples in a plan view similar to thatof FIG. 5.

FIG. 6 shows a quadratic or, in plan view, rectangular combination stop50, which includes the two first openings 51 and 52 as aperture stopsand a total of four second openings 53, 54, 55, 56 as stray light stopsor field stops. The stop openings 51, 53 and 54 represent one unit,which can be used at the same time in the ray path of a projectionarrangement, while the stop openings 52, 55 and 56 represent a secondunit, which can be provided by way of alternative to the first unit inthe ray path of a projection arrangement. The combination stop 50 isformed such that the centers of the corresponding openings 51 to 56 arearranged along a straight line 57, such that a simple pushing movementof the combination stop 50 along the longitudinal direction L can effectan exchange of the stops.

FIG. 7 shows in an illustration similar to FIG. 6 a combination stop 100in which overall four stop units each with three stop openings areprovided, more precisely each with a first opening 101, 102, 103, 104and each with two second openings 105, 106; 107, 108, 109; 110 and 111,112. The combination stop 100, which is also rectangular in the planview, is formed however such that in each case the first openings 101 to104 are arranged along a straight line 114, while the respective secondopenings 105 to 112 are also arranged along two straight lines 113 and115. While the combination stop 50 of FIG. 6 can be moved along thelongitudinal direction L in order that the differently formed stop unitsmay be moved into the ray path, the combination stop 100 can bring thedifferent stop units into operation by a push along the width directionB.

Whereas, in FIG. 6, the second stop unit differs not only in that thefirst openings 51 and 52 are of different size, that is, are formed witha different diameter D, but that additionally the second stop openings53, 54, 55, 56 are of different size, in the case of combination stop100 of FIG. 7, merely a variant of the first openings 101 to 104 isprovided, while the second openings have the same order of magnitude.

In a segmented configuration of the combination stop 100, in which, forexample, the second openings 105, 107, 109 and 111 are arranged on onesegment, the first openings 101 to 104 are arranged on a second segmentand the second openings 106, 108, 110 and 112 are arranged on a thirdsegment, it is also conceivable for the segments with the secondopenings to each have only one second opening, which is then accordinglypushed with the segment of the first opening or this is arrangedstationary in the projection arrangement and only the segment with thefirst openings is designed such that it can be pushed.

Although the disclosure has been described in detail for someembodiments using the attached drawings, the disclosure is notrestricted to these embodiments. Modifications, such as differentcombinations of individual features as well as the exclusion of certainfeatures, are possible without departing from the scope of theaccompanying claims.

What is claimed is:
 1. A projection arrangement configured to image anobject field in an object plane onto an image field in an image planealong a ray path, the projection arrangement comprising: first andsecond reflective elements; a combination stop having first, second, andthird openings; and a reticle; wherein: the combination stop is betweenthe reticle and the first reflective element; the combination stop isbetween the first reflective element and the second reflective element;a first opening in the combination stop is configured to allow passageof the ray bundle from the first reflective element to the secondreflective element; a second opening in the combination stop isconfigured to allow passage of the ray bundle between the reticle andfirst reflective element; a third opening in the combination stop isconfigured to allow passage of the ray bundle from the second reflectiveelement; and the projection arrangement is a microlithography projectionarrangement.
 2. The projection arrangement in accordance with claim 1,wherein the second opening in the combination stop is greater than orequal to 10 mm.
 3. The projection arrangement in accordance with claim1, wherein the third opening in the combination stop is greater than orequal to 10 mm.
 4. The projection arrangement in accordance with claim1, wherein the second and third openings in the combination stop arearranged point-symmetrically to the center of the first opening.
 5. Theprojection arrangement in accordance with claim 1, wherein a device isconfigured to move the combination stop transversely to a meridionalplane defined by the projection arrangement and the object field.
 6. Theprojection arrangement in accordance with claim 5, wherein the device isconfigured to facilitate at least one movement selected from the groupconsisting of rotary movement of the combination stop in a planeperpendicular to the meridional plane and translational movement of thecombination stop in a plane perpendicular to the meridional plane. 7.The projection arrangement in accordance with claim 5, wherein themeridional plane contains the principal beam through the center of thefirst opening and an optical axis of the projection arrangement.
 8. Theprojection arrangement in accordance with claim 1, wherein thecombination stop comprises a plurality of stop units, and each stop unithas first and second openings, and wherein for each of the stop units ofthe projection arrangement: a cross-sectional shape of the first openinghas a center of gravity in a plane; and a cross-sectional shape of thesecond opening has a center of gravity in the plane, and wherein thecenters of gravity of the cross-sectional shapes of all of the first andsecond openings of all of the stop units of the projection arrangementare in a straight line.
 9. The projection arrangement in accordance withclaim 8, wherein a width of the combination stop transverse to adirection of the line is less than 1.5 times a diameter of a largestfirst opening of the combination stop or a maximum linear dimension ofany of the second openings of the combination stop.
 10. The projectionarrangement in accordance with claim 8, wherein a length of thecombination stop parallel to a direction of the line is 1.5 times a sumof the diameters of the first openings of the combination stop and amaximum linear dimension of any of the second openings parallel to thedirection of the line.
 11. The projection arrangement in accordance withclaim 1, wherein the combination stop comprises a plurality of stopunits, and each stop unit has first and second openings, and wherein,for each of the stop units of the projection arrangement: across-sectional shape of the first opening has a center of gravity in aplane; and a cross-sectional shape of the second opening has a center ofgravity in the plane, and wherein the centers of gravity of thecross-sectional shapes of all the first openings of all the stop unitsof the projection arrangement are in a first straight line, the centersof gravity of the cross-sectional shapes of all the second openings ofall the stop units of the projection arrangement are in a secondstraight line, and the first straight line is different from the secondstraight line.
 12. The projection arrangement in accordance with claim1, further comprising a magazine and a plurality of combination stopseach of which differ in at least one opening size, the plurality ofcombination stops being in the magazine.
 13. The projection arrangementin accordance with claim 1, wherein the combination stop has a segmenteddesign.
 14. The projection arrangement in accordance with claim 13,wherein the segments of the combination stop can be moved separately bya device to move the combination stop.
 15. The projection arrangement inaccordance with claim 13, wherein, for a given combination stop, thefirst opening is exchangeable separately from the second opening. 16.The projection arrangement in accordance with claim 1, wherein thecombination stop or parts thereof are formed as a rectangular orquadratic plate in a plan view of a principal surface.
 17. Theprojection arrangement in accordance with claim 1, wherein a minimumdistance between the first opening in the combination stop and thesecond opening in the combination stop is at most 5 mm.
 18. Theprojection arrangement in accordance with claim 1, wherein a thicknessof the combination stop is less than one 50th of a diameter of the firstopening.
 19. The projection arrangement in accordance with claim 1,wherein the combination stop can be moved in at least one way selectedfrom the group consisting of movement along a longitudinal direction ofthe combination stop, movement along a width direction of thecombination stop and swivelling about a rotary axis.
 20. The projectionarrangement in accordance with claim 1, wherein the combination stop inat least one direction transverse to an optical axis of the projectionarrangement has at most one third of the maximum or minimum extension ofan envelope of the projection arrangement transverse to the opticalaxis.
 21. The projection arrangement in accordance with claim 1, furthercomprising at least one additional stray light stop.
 22. The projectionarrangement in accordance with claim 21, wherein the at least oneadditional stray light stop can be moved together with the combinationstop by a device for moving the combination stop.
 23. The projectionarrangement in accordance with claim 21, wherein the at least oneadditional stray light stop is arranged in at least one locationselected from the group consisting of a field plane, the vicinity of thefield plane, an intermediate image plane, and the vicinity of theintermediate image plane.
 24. The projection arrangement in accordancewith claim 21, wherein the combination stop and the at least oneadditional stray light stop are joined together in at least one wayselected from the group consisting of a physical connection, a rigidconnection and an articulated connection.
 25. The projection arrangementin accordance with claim 1, wherein the first opening has at least oneelement selected from the group consisting of obscuration mechanisms,optically operative elements, apodisation filters, phase filters andpolarisation filters.
 26. The projection arrangement in accordance withclaim 25, wherein the first opening has obscuration mechanisms includingrings and/or discs.
 27. The projection arrangement in accordance withclaim 1, wherein the combination stop is part of a vacuum housing. 28.The projection arrangement in accordance with claim 1, wherein theprojection arrangement is catoptric.
 29. The projection arrangement inaccordance with claim 1, wherein the projection arrangement comprisessix mirrors.
 30. The projection arrangement in accordance with claim 1,wherein an optical axis of the projection arrangement is defined by aconnecting line between curvature mid-points of the reflective elements.31. A projection arrangement configured to image an object field in anobject plane onto an image field in an image plane along a ray path, theprojection arrangement comprising: first, second, and third reflectiveelements; a plurality of combination stops, each of the combinationstops having first, second, and third openings; a reticle; and amagazine configured to hold a plurality of combination stops, eachcombination stop having different sized openings, wherein: the pluralityof combination stops comprises a first combination stop; the firstcombination stop is between the reticle and the first reflectiveelement; the first combination stop is between the first reflectiveelement and the second reflective element; a first opening in the firstcombination stop is configured to allow passage of the ray bundle fromthe first reflective element to the second reflective element; a secondopening in the first combination stop is configured to allow passage ofthe ray bundle between the reticle and first reflective element; a thirdopening in the first combination stop is configured to allow passage ofthe ray bundle from the second reflective element; and the projectionarrangement is a micro lithography projection arrangement.
 32. Theprojection arrangement in accordance with claim 31, wherein in the caseof a smaller first opening, the second and third opening or each furtheropening are also smaller and vice versa.
 33. The projection arrangementin accordance with claim 31, wherein in the case of a smaller or largerfirst opening, second or third openings are equal.
 34. The projectionarrangement in accordance with claim 31, further comprising a deviceconfigured to move the combination stop out of the ray path.
 35. Theprojection arrangement in accordance with claim 34, wherein the devicecan be moved at least partly in the direction of the ray path.
 36. Theprojection arrangement in accordance with claim 34, wherein the devicecomprises a magazine to store several combination stops, and the devicecomprises an exchange mechanism to exchange combination stops.